Multilayer reflectors for the 200 Å region

Felix E. Fernandez, Charles M. Falco

Research output: Contribution to journalArticle

Abstract

Silicon/tungsten multilayer normal-incidence mirrors with maximum reflectance at 212 Å have been designed and studied. Details of the fabrication and characterization techniques are given. Preliminary results of synchrotron measurements show agreement with calculations based on microscopic structure of these multilayers. The Si/W combination has desirable characteristics for use in X-UV or soft x-ray devices.

Original languageEnglish (US)
Pages (from-to)104-109
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume688
DOIs
StatePublished - Apr 9 1987

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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