MULTILAYER REFLECTORS FOR THE 200 A REGION.

Felix E. Fernandez, Charles M Falco

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Silicon/tungsten multilayer normal-incidence mirrors with maximum reflectance at 212 Angstrom have been designed and studied. Details of the fabrication and characterization techniques are given. Preliminary results of synchrotron measurements show agreement with calculations based on microscopic structure of these multilayers. The Si/W combination has desirable characteristics for use in X-UV or soft x-ray devices.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsNatale M. Ceglio, Pierre Dhez
PublisherSPIE
Pages104-109
Number of pages6
Volume688
ISBN (Print)0892527234
StatePublished - 1987

Fingerprint

reflectors
Multilayers
tungsten
synchrotrons
incidence
mirrors
reflectance
fabrication
silicon
Synchrotrons
Tungsten
x rays
Fabrication
X rays
Silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Fernandez, F. E., & Falco, C. M. (1987). MULTILAYER REFLECTORS FOR THE 200 A REGION. In N. M. Ceglio, & P. Dhez (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 688, pp. 104-109). SPIE.

MULTILAYER REFLECTORS FOR THE 200 A REGION. / Fernandez, Felix E.; Falco, Charles M.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Natale M. Ceglio; Pierre Dhez. Vol. 688 SPIE, 1987. p. 104-109.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fernandez, FE & Falco, CM 1987, MULTILAYER REFLECTORS FOR THE 200 A REGION. in NM Ceglio & P Dhez (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 688, SPIE, pp. 104-109.
Fernandez FE, Falco CM. MULTILAYER REFLECTORS FOR THE 200 A REGION. In Ceglio NM, Dhez P, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 688. SPIE. 1987. p. 104-109
Fernandez, Felix E. ; Falco, Charles M. / MULTILAYER REFLECTORS FOR THE 200 A REGION. Proceedings of SPIE - The International Society for Optical Engineering. editor / Natale M. Ceglio ; Pierre Dhez. Vol. 688 SPIE, 1987. pp. 104-109
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