Multilayer soft x-ray optics

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Molecular Beam Epitaxy (MBE) is able to produce high purity, epitaxial multilayer films with well defined interfaces. This precise deposition control along with a number of in situ characterization instruments allows a high degree of control over the formation of multilayers. We have three MBE systems, each with characteristics suitable for a subset of possible materials, that we have used to produce a large variety of x-ray multilayers. Together these MBE systems contain Reflection High Energy Electron Diffraction (RHEED), Low Energy Electron Diffraction (LEED), Auger Electron Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS), Ion Scattering Spectroscopy (ISS), Secondary Ion Mass Spectroscopy (SIMS), and Scanning Tunneling Microscopy (STM). Here I provide an overview of the techniques the students, postdocs, visiting scientists, and collaborators have used to select the materials pairs we have grown and analyzed for our x-ray multilayers.

Original languageEnglish (US)
Title of host publicationFifty Years of Optical Sciences at the University of Arizona
EditorsJohn E. Greivenkamp, Eustace L. Dereniak, Harrison H. Barrett
PublisherSPIE
ISBN (Electronic)9781628412130
DOIs
StatePublished - 2014
Event50 Years of Optical Sciences at the University of Arizona - San Diego, United States
Duration: Aug 19 2014Aug 20 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9186
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

Other50 Years of Optical Sciences at the University of Arizona
Country/TerritoryUnited States
CitySan Diego
Period8/19/148/20/14

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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