Multilayer soft x-ray optics

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Molecular Beam Epitaxy (MBE) is able to produce high purity, epitaxial multilayer films with well defined interfaces. This precise deposition control along with a number of in situ characterization instruments allows a high degree of control over the formation of multilayers. We have three MBE systems, each with characteristics suitable for a subset of possible materials, that we have used to produce a large variety of x-ray multilayers. Together these MBE systems contain Reflection High Energy Electron Diffraction (RHEED), Low Energy Electron Diffraction (LEED), Auger Electron Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS), Ion Scattering Spectroscopy (ISS), Secondary Ion Mass Spectroscopy (SIMS), and Scanning Tunneling Microscopy (STM). Here I provide an overview of the techniques the students, postdocs, visiting scientists, and collaborators have used to select the materials pairs we have grown and analyzed for our x-ray multilayers.

Original languageEnglish (US)
Title of host publicationFifty Years of Optical Sciences at the University of Arizona
EditorsJohn E. Greivenkamp, Eustace L. Dereniak, Harrison H. Barrett
ISBN (Electronic)9781628412130
StatePublished - 2014
Event50 Years of Optical Sciences at the University of Arizona - San Diego, United States
Duration: Aug 19 2014Aug 20 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


Other50 Years of Optical Sciences at the University of Arizona
Country/TerritoryUnited States
CitySan Diego

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Multilayer soft x-ray optics'. Together they form a unique fingerprint.

Cite this