Multilayer soft x-ray optics

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Molecular Beam Epitaxy (MBE) is able to produce high purity, epitaxial multilayer films with well defined interfaces. This precise deposition control along with a number of in situ characterization instruments allows a high degree of control over the formation of multilayers. We have three MBE systems, each with characteristics suitable for a subset of possible materials, that we have used to produce a large variety of x-ray multilayers. Together these MBE systems contain Reflection High Energy Electron Diffraction (RHEED), Low Energy Electron Diffraction (LEED), Auger Electron Spectroscopy (AES), X-Ray Photoelectron Spectroscopy (XPS), Ion Scattering Spectroscopy (ISS), Secondary Ion Mass Spectroscopy (SIMS), and Scanning Tunneling Microscopy (STM). Here I provide an overview of the techniques the students, postdocs, visiting scientists, and collaborators have used to select the materials pairs we have grown and analyzed for our x-ray multilayers.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
ISBN (Print)9781628412130
StatePublished - 2014
Event50 Years of Optical Sciences at the University of Arizona - San Diego, United States
Duration: Aug 19 2014Aug 20 2014


Other50 Years of Optical Sciences at the University of Arizona
CountryUnited States
CitySan Diego

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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