Optical elements for soft Xray radiation are required for a wide variety of applications. Multilayer thin films are currently used for some of these applications, and they show potential for many others. We review the operating and design principles of multilayer soft Xray mirrors, causes for reflectance losses, fabrication requirements, and characterization and testing procedures.
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering