Multilayers for Soft Xray Optics

Félix E. Fernández, Charles M. Falco

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Optical elements for soft Xray radiation are required for a wide variety of applications. Multilayer thin films are currently used for some of these applications, and they show potential for many others. We review the operating and design principles of multilayer soft Xray mirrors, causes for reflectance losses, fabrication requirements, and characterization and testing procedures.

Original languageEnglish (US)
Pages (from-to)1758-1762
Number of pages5
JournalIEEE Journal of Quantum Electronics
Issue number8
StatePublished - Aug 1988

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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