Multilayers for Soft Xray Optics

Félix E. Fernández; Charles M. Falco

doi:10.1109/3.7105

Multilayers for Soft Xray Optics

Félix E. Fernández, Charles M. Falco

Optical Sciences, College of

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

Optical elements for soft Xray radiation are required for a wide variety of applications. Multilayer thin films are currently used for some of these applications, and they show potential for many others. We review the operating and design principles of multilayer soft Xray mirrors, causes for reflectance losses, fabrication requirements, and characterization and testing procedures.

Original language	English (US)
Pages (from-to)	1758-1762
Number of pages	5
Journal	IEEE Journal of Quantum Electronics
Volume	24
Issue number	8
DOIs	https://doi.org/10.1109/3.7105
State	Published - Aug 1988

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/3.7105

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title = "Multilayers for Soft Xray Optics",

abstract = "Optical elements for soft Xray radiation are required for a wide variety of applications. Multilayer thin films are currently used for some of these applications, and they show potential for many others. We review the operating and design principles of multilayer soft Xray mirrors, causes for reflectance losses, fabrication requirements, and characterization and testing procedures.",

author = "Fern{\'a}ndez, {F{\'e}lix E.} and Falco, {Charles M.}",

note = "Funding Information: Manuscript received November 20, 1987; revised March 31, 1988. This work was supported by the AFOSR/ARO/JSOP under Contract F49620-85-C-0039, the AFOSRIURIP under Contract AFOSR-86-0347, and the AFOSR under Contract AFOSR-88-0010.",

year = "1988",

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AU - Fernández, Félix E.

AU - Falco, Charles M.

N1 - Funding Information: Manuscript received November 20, 1987; revised March 31, 1988. This work was supported by the AFOSR/ARO/JSOP under Contract F49620-85-C-0039, the AFOSRIURIP under Contract AFOSR-86-0347, and the AFOSR under Contract AFOSR-88-0010.

PY - 1988/8

Y1 - 1988/8

N2 - Optical elements for soft Xray radiation are required for a wide variety of applications. Multilayer thin films are currently used for some of these applications, and they show potential for many others. We review the operating and design principles of multilayer soft Xray mirrors, causes for reflectance losses, fabrication requirements, and characterization and testing procedures.

AB - Optical elements for soft Xray radiation are required for a wide variety of applications. Multilayer thin films are currently used for some of these applications, and they show potential for many others. We review the operating and design principles of multilayer soft Xray mirrors, causes for reflectance losses, fabrication requirements, and characterization and testing procedures.

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Multilayers for Soft Xray Optics

Abstract

ASJC Scopus subject areas

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