Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

P. Äyräs, J. T. Rantala, R. Levy, M. R. Descour, S. Honkanen, N. Peyghambarian

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a continuous test profile are demonstrated. A maximum depth difference exceeding 1.5 μm is obtained, which permits the fabrication of multilevel diffractive elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of complex multilevel micro-optical structures.

Original languageEnglish (US)
Pages (from-to)9-12
Number of pages4
JournalThin Solid Films
Volume352
Issue number1-2
DOIs
StatePublished - Sep 8 1999

Keywords

  • Glass
  • Sol-gel
  • Surface structure

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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