Abstract
Multiple sample manipulator for a standard ultrahigh vacuum surface analysis chamber was discussed. The chamber holds four samples arranged in a carousel to make angle resolved spectroscopy measurements. Results showed that the manipulator reduces the number of pump down cycles necessary in the load lock for sample transfer.
Original language | English (US) |
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Pages (from-to) | 1036-1042 |
Number of pages | 7 |
Journal | Review of Scientific Instruments |
Volume | 74 |
Issue number | 2 |
DOIs | |
State | Published - Feb 1 2003 |
ASJC Scopus subject areas
- Instrumentation