A three-stage, multilayer ceramic microdischarge device, having an active length of ∼267 μm and a cylindrical discharge channel 140-150 μm in diameter, has been developed and operated continuously in Ne gas. Stable glow discharges are produced for pressures above 1 atm, operating voltages as low as 137 V (at 800 Torr), and specific power loadings of ∼40 kW cm-3. The V-I characteristics for a fired ceramic structure exhibit a negative resistance, whereas the resistance is positive prior to firing. The manufacturability of the fabrication process as well as the "flow-through" and multistage design of this device make it well suited for the excitation of gas microlasers or the dissociation of toxic or environmentally hazardous gases and vapors.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)