Nanoscale imaging with coherent acoustic phonon pulses

J. Klein, T. B. Norris, B. C. Daly, Stanley K H Pau, D. M. Tennant, J. A. Taylor, J. E. Bower

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 pm features that is buried beneath an A1 film. Simulation results for higher resolution measurements are also described.

Original languageEnglish (US)
Title of host publicationOptics InfoBase Conference Papers
PublisherOptical Society of America
ISBN (Print)1557528136, 9781557528131
StatePublished - 2006
Externally publishedYes
EventQuantum Electronics and Laser Science Conference, QELS 2006 - Long Beach, CA, United States
Duration: May 21 2006May 21 2006

Other

OtherQuantum Electronics and Laser Science Conference, QELS 2006
CountryUnited States
CityLong Beach, CA
Period5/21/065/21/06

Fingerprint

Acoustics
Imaging techniques
acoustics
Photoresists
pulses
photoresists
high resolution
simulation

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Klein, J., Norris, T. B., Daly, B. C., Pau, S. K. H., Tennant, D. M., Taylor, J. A., & Bower, J. E. (2006). Nanoscale imaging with coherent acoustic phonon pulses. In Optics InfoBase Conference Papers Optical Society of America.

Nanoscale imaging with coherent acoustic phonon pulses. / Klein, J.; Norris, T. B.; Daly, B. C.; Pau, Stanley K H; Tennant, D. M.; Taylor, J. A.; Bower, J. E.

Optics InfoBase Conference Papers. Optical Society of America, 2006.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Klein, J, Norris, TB, Daly, BC, Pau, SKH, Tennant, DM, Taylor, JA & Bower, JE 2006, Nanoscale imaging with coherent acoustic phonon pulses. in Optics InfoBase Conference Papers. Optical Society of America, Quantum Electronics and Laser Science Conference, QELS 2006, Long Beach, CA, United States, 5/21/06.
Klein J, Norris TB, Daly BC, Pau SKH, Tennant DM, Taylor JA et al. Nanoscale imaging with coherent acoustic phonon pulses. In Optics InfoBase Conference Papers. Optical Society of America. 2006
Klein, J. ; Norris, T. B. ; Daly, B. C. ; Pau, Stanley K H ; Tennant, D. M. ; Taylor, J. A. ; Bower, J. E. / Nanoscale imaging with coherent acoustic phonon pulses. Optics InfoBase Conference Papers. Optical Society of America, 2006.
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