Nanoscale imaging with coherent acoustic phonon pulses

J. Klein, T. B. Norris, B. C. Daly, S. Pau, D. M. Tennant, J. A. Taylor, J. E. Bower

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 pm features that is buried beneath an A1 film. Simulation results for higher resolution measurements are also described.

Original languageEnglish (US)
Title of host publicationQuantum Electronics and Laser Science Conference, QELS 2006
PublisherOptical Society of America
ISBN (Print)1557528136, 9781557528131
StatePublished - Jan 1 2006
Externally publishedYes
EventQuantum Electronics and Laser Science Conference, QELS 2006 - Long Beach, CA, United States
Duration: May 21 2006May 21 2006

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherQuantum Electronics and Laser Science Conference, QELS 2006
CountryUnited States
CityLong Beach, CA
Period5/21/065/21/06

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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