Nanoscale imaging with coherent acoustic phonon pulses

J. Klein, T. B. Norris, B. C. Daly, S. Pau, D. M. Tennant, J. A. Taylor, J. E. Bower

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 μm features that is buried beneath an Al film. Simulation results for higher resolution measurements are also described.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006
DOIs
StatePublished - Dec 1 2006
Externally publishedYes
EventConference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006 - Long Beach, CA, United States
Duration: May 21 2006May 26 2006

Publication series

NameConference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006

Other

OtherConference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006
CountryUnited States
CityLong Beach, CA
Period5/21/065/26/06

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

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