Nanoscale imaging with coherent acoustic phonon pulses

J. Klein, T. B. Norris, B. C. Daly, Stanley K H Pau, D. M. Tennant, J. A. Taylor, J. E. Bower

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe ultrafast coherent acoustic phonon measurements of a latent photoresist pattern with 1 μm features that is buried beneath an Al film. Simulation results for higher resolution measurements are also described.

Original languageEnglish (US)
Title of host publicationConference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006
DOIs
StatePublished - 2006
Externally publishedYes
EventConference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006 - Long Beach, CA, United States
Duration: May 21 2006May 26 2006

Other

OtherConference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006
CountryUnited States
CityLong Beach, CA
Period5/21/065/26/06

Fingerprint

Acoustics
Imaging techniques
acoustics
Photoresists
pulses
photoresists
high resolution
simulation

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

Cite this

Klein, J., Norris, T. B., Daly, B. C., Pau, S. K. H., Tennant, D. M., Taylor, J. A., & Bower, J. E. (2006). Nanoscale imaging with coherent acoustic phonon pulses. In Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006 [4628910] https://doi.org/10.1109/CLEO.2006.4628910

Nanoscale imaging with coherent acoustic phonon pulses. / Klein, J.; Norris, T. B.; Daly, B. C.; Pau, Stanley K H; Tennant, D. M.; Taylor, J. A.; Bower, J. E.

Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006. 2006. 4628910.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Klein, J, Norris, TB, Daly, BC, Pau, SKH, Tennant, DM, Taylor, JA & Bower, JE 2006, Nanoscale imaging with coherent acoustic phonon pulses. in Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006., 4628910, Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006, Long Beach, CA, United States, 5/21/06. https://doi.org/10.1109/CLEO.2006.4628910
Klein J, Norris TB, Daly BC, Pau SKH, Tennant DM, Taylor JA et al. Nanoscale imaging with coherent acoustic phonon pulses. In Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006. 2006. 4628910 https://doi.org/10.1109/CLEO.2006.4628910
Klein, J. ; Norris, T. B. ; Daly, B. C. ; Pau, Stanley K H ; Tennant, D. M. ; Taylor, J. A. ; Bower, J. E. / Nanoscale imaging with coherent acoustic phonon pulses. Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference, CLEO/QELS 2006. 2006.
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