Nanostructure imaging with sub-THz coherent acoustic phonon pulses

B. C. Daly, N. C.R. Holme, C. Branciard, T. B. Norris, S. Pau, D. M. Tennant, J. A. Taylor, J. E. Bower

Research output: Contribution to journalConference articlepeer-review

Abstract

We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.

Original languageEnglish (US)
Pages (from-to)159-160
Number of pages2
JournalOSA Trends in Optics and Photonics Series
Volume97
StatePublished - Jan 1 2004
Externally publishedYes
EventInternational Quantum Electronics Conference, IQEC - San Francisco, CA, United States
Duration: May 21 2004May 26 2004

ASJC Scopus subject areas

  • Engineering(all)

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