Nanostructure imaging with sub-THz coherent acoustic phonon pulses

B. C. Daly, N. C R Holme, C. Branciard, T. B. Norris, Stanley K H Pau, D. M. Tennant, J. A. Taylor, J. E. Bower

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.

Original languageEnglish (US)
Title of host publicationOSA Trends in Optics and Photonics Series
PublisherOptical Society of American (OSA)
Pages159-160
Number of pages2
Volume97
StatePublished - 2004
Externally publishedYes
EventInternational Quantum Electronics Conference, IQEC - San Francisco, CA, United States
Duration: May 21 2004May 26 2004

Other

OtherInternational Quantum Electronics Conference, IQEC
CountryUnited States
CitySan Francisco, CA
Period5/21/045/26/04

Fingerprint

Image resolution
Nanostructures
Acoustics
Imaging techniques
Substrates

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Daly, B. C., Holme, N. C. R., Branciard, C., Norris, T. B., Pau, S. K. H., Tennant, D. M., ... Bower, J. E. (2004). Nanostructure imaging with sub-THz coherent acoustic phonon pulses. In OSA Trends in Optics and Photonics Series (Vol. 97, pp. 159-160). Optical Society of American (OSA).

Nanostructure imaging with sub-THz coherent acoustic phonon pulses. / Daly, B. C.; Holme, N. C R; Branciard, C.; Norris, T. B.; Pau, Stanley K H; Tennant, D. M.; Taylor, J. A.; Bower, J. E.

OSA Trends in Optics and Photonics Series. Vol. 97 Optical Society of American (OSA), 2004. p. 159-160.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Daly, BC, Holme, NCR, Branciard, C, Norris, TB, Pau, SKH, Tennant, DM, Taylor, JA & Bower, JE 2004, Nanostructure imaging with sub-THz coherent acoustic phonon pulses. in OSA Trends in Optics and Photonics Series. vol. 97, Optical Society of American (OSA), pp. 159-160, International Quantum Electronics Conference, IQEC, San Francisco, CA, United States, 5/21/04.
Daly BC, Holme NCR, Branciard C, Norris TB, Pau SKH, Tennant DM et al. Nanostructure imaging with sub-THz coherent acoustic phonon pulses. In OSA Trends in Optics and Photonics Series. Vol. 97. Optical Society of American (OSA). 2004. p. 159-160
Daly, B. C. ; Holme, N. C R ; Branciard, C. ; Norris, T. B. ; Pau, Stanley K H ; Tennant, D. M. ; Taylor, J. A. ; Bower, J. E. / Nanostructure imaging with sub-THz coherent acoustic phonon pulses. OSA Trends in Optics and Photonics Series. Vol. 97 Optical Society of American (OSA), 2004. pp. 159-160
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