Near-field induced polarization imaging for optical data storage metrology

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Near-field induced polarization imaging with a solid immersion lens (SIL) is used to provide high lateral resolution compared with conventional far-field microscopy. In addition, a new technique is used to obtain height information from the near-field induced polarization (cross polarized) image. Several optical data storage samples, including DVD-R, DVD-RW, BD-RW, are studied with this imaging technique. A calibration target indicates an accuracy of ± 2nm for obtaining height information.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Volume6282
DOIs
Publication statusPublished - 2006
EventOptical Data Storage 2006 - Montreal, Canada
Duration: Apr 23 2006Apr 26 2006

Other

OtherOptical Data Storage 2006
CountryCanada
CityMontreal
Period4/23/064/26/06

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Keywords

  • High resolution
  • Near-field
  • Solid immersion lens (SIL)
  • Topographical image

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Chen, T., & Milster, T. D. (2006). Near-field induced polarization imaging for optical data storage metrology. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 6282). [62820D] https://doi.org/10.1117/12.685172