Near-field solid immersion lens microscope with advanced compact mechanical design

Tao Chen, Tom Milster, Sang Ki Park, Brendan McCarthy, Dror Sarid, Christian Poweleit, Jose Menendez

Research output: Contribution to journalArticle

9 Scopus citations

Abstract

A compact mechanical package is developed for a standard microscope that implements a solid immersion lens (SIL) on a retractable bimorph swing arm. With the compact package mounted on an inverted microscope, far-field and near-field images are obtained at the same location by moving the SIL with the swing arm. With white-light incoherent illuminafion, the resolution of this system for observing digital versatile discs is around 200 nm with an effective numerical aperture of 1.5. Imaging with the SIL is compared with an atomic force microscopy scan.

Original languageEnglish (US)
Article number103002
JournalOptical Engineering
Volume45
Issue number10
DOIs
StatePublished - Oct 1 2006

Keywords

  • Microscopy
  • Near field
  • Optical data storage
  • Solid immersion lens

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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  • Cite this

    Chen, T., Milster, T., Park, S. K., McCarthy, B., Sarid, D., Poweleit, C., & Menendez, J. (2006). Near-field solid immersion lens microscope with advanced compact mechanical design. Optical Engineering, 45(10), [103002]. https://doi.org/10.1117/1.2361276