Near-field solid immersion lens (SIL) microscope

Tao Chen, David Felix, Sang Ki Park, Brendan McCarthy, Dror Sarid, Thomas D Milster

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A near-field solid immersion lens (SIL) microscope is developed for a standard microscope. With white-light incoherent illumination, the resolution of this system for observing DVDs pits is around 200nm with an effective NA of 1.5.

Original languageEnglish (US)
Title of host publicationOptics InfoBase Conference Papers
PublisherOptical Society of America
ISBN (Print)1557527970, 9781557527974
Publication statusPublished - 2005
EventFrontiers in Optics, FiO 2005 - Tucson, AZ, United States
Duration: Oct 16 2005Oct 21 2005

Other

OtherFrontiers in Optics, FiO 2005
CountryUnited States
CityTucson, AZ
Period10/16/0510/21/05

    Fingerprint

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Chen, T., Felix, D., Park, S. K., McCarthy, B., Sarid, D., & Milster, T. D. (2005). Near-field solid immersion lens (SIL) microscope. In Optics InfoBase Conference Papers Optical Society of America.