New approach for pre-polish grinding with low subsurface damage

James B. Johnson, Dae Wook Kim, Robert E. Parks, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Scopus citations

Fingerprint Dive into the research topics of 'New approach for pre-polish grinding with low subsurface damage'. Together they form a unique fingerprint.

Mathematics

Chemical Compounds

Physics & Astronomy

Engineering & Materials Science