An optimization technique based on dynamic programming procedure and a linear electron lens model is proposed. The method is suitable for minimization of electron optical aberrations.
|Original language||English (US)|
|Number of pages||10|
|State||Published - Jan 1 1977|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering