New developments in the design of ring-field projection cameras for EUV lithography: Passive pupil correction

Research output: Contribution to journalConference article

2 Scopus citations

Abstract

In this paper we have discussed how the concept of passive pupil correction can be applied to improve the field performance of a ring field system. This improvement involves an optical surface coincident with the stop, or with a pupil of the system. To implement passive pupil correction, such a surface carries a non-axially symmetric asphericity that cancels aberrations along one meridian of the ring field. Because this surface is non-axially symmetric, the axial symmetry of original camera is broken and therefore the aberration compensation is not perfect for other meridians. However, an improvement of a factor of 4 can be expected if the original aberration residual consists of simple terms. The distortion characteristics of the original axially symmetric system are unchanged because the non-axially symmetric asphericity does not affect propagation of chief rays.

Original languageEnglish (US)
Pages (from-to)658-663
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3482
DOIs
StatePublished - Sep 21 1998
EventInternational Optical Design Conference 1998 - Kona, United States
Duration: Jun 8 1998Jun 12 1998

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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