New polycrystalline silicon technology for integrated sensor applications

Mingxiang Wang, Zhiguo Meng, Yitshak Zohar, Man Wong

Research output: Contribution to conferencePaperpeer-review

3 Scopus citations

Abstract

A novel metal-induced lateral crystallization (MILC) technique has been applied to the formation of polycrystalline silicon (poly-Si) with greatly enhanced material characteristics. Compared to conventional poly-Si, MILC poly-Si gives rise to much improved performance not only in sensors but also in thin film transistors. A variety of sensing and electronic devices can be realized simultaneously on MILC poly-Si, thus making MILC an enabling technology for integrated silicon micro-machining.

Original languageEnglish (US)
Pages114-119
Number of pages6
StatePublished - Jan 1 2000
Externally publishedYes
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: Jan 23 2000Jan 27 2000

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period1/23/001/27/00

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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