New polycrystalline silicon technology for integrated sensor applications

Mingxiang Wang, Zhiguo Meng, Yitshak Zohar, Man Wong

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

A novel metal-induced lateral crystallization (MILC) technique has been applied to the formation of polycrystalline silicon (poly-Si) with greatly enhanced material characteristics. Compared to conventional poly-Si, MILC poly-Si gives rise to much improved performance not only in sensors but also in thin film transistors. A variety of sensing and electronic devices can be realized simultaneously on MILC poly-Si, thus making MILC an enabling technology for integrated silicon micro-machining.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Pages114-119
Number of pages6
StatePublished - 2000
Externally publishedYes
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: Jan 23 2000Jan 27 2000

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period1/23/001/27/00

Fingerprint

Polysilicon
Crystallization
Sensors
Metals
Thin film transistors
Machining
Silicon

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Wang, M., Meng, Z., Zohar, Y., & Wong, M. (2000). New polycrystalline silicon technology for integrated sensor applications. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 114-119). IEEE.

New polycrystalline silicon technology for integrated sensor applications. / Wang, Mingxiang; Meng, Zhiguo; Zohar, Yitshak; Wong, Man.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2000. p. 114-119.

Research output: Chapter in Book/Report/Conference proceedingChapter

Wang, M, Meng, Z, Zohar, Y & Wong, M 2000, New polycrystalline silicon technology for integrated sensor applications. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, pp. 114-119, 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Jpn, 1/23/00.
Wang M, Meng Z, Zohar Y, Wong M. New polycrystalline silicon technology for integrated sensor applications. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE. 2000. p. 114-119
Wang, Mingxiang ; Meng, Zhiguo ; Zohar, Yitshak ; Wong, Man. / New polycrystalline silicon technology for integrated sensor applications. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2000. pp. 114-119
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