New wet cleaning strategies for obtaining highly reliable thin oxides

M. M. Heyns, S. Verhaverbeke, M. Meuris, P. W. Mertens, H. Schmidt, M. Kubota, A. Philipossian, K. Dillenbeck, D. Graef, A. Schnegg, R. de Blank

Research output: Chapter in Book/Report/Conference proceedingConference contribution

33 Scopus citations

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