Non-null full field X-ray mirror metrology using scots: A reflection deflectometry approach

Peng Su, Yuhao Wang, James H. Burge, Konstantine Kaznatcheev, Mourad Idir

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Abstract

In a previous paper, the University of Arizona (UA) has developed a measurement technique called: Software Configurable Optical Test System (SCOTS) based on the principle of reflection deflectometry. In this paper, we present results of this very efficient optical metrology method applied to the metrology of X-ray mirrors. We used this technique to measure surface slope errors with precision and accuracy better than 100 nrad (rms) and ∼200 nrad (rms), respectively, with a lateral resolution of few mm or less. We present results of the calibration of the metrology systems, discuss their accuracy and address the precision in measuring a spherical mirror.

Original languageEnglish (US)
Pages (from-to)12393-12406
Number of pages14
JournalOptics Express
Volume20
Issue number11
DOIs
StatePublished - May 21 2012

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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