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Nonorthogonal wafer dicing for waveguide, microelectromechanical systems, and nanotechnology applications
S. Pau
, J. A. Taylor, C. S. Pai
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Article
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peer-review
2
Scopus citations
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Engineering & Materials Science
Dry etching
Reactive ion etching
Photoresists
Photolithography
Nanotechnology
Etching
Waveguides
Masks
MEMS
Physics & Astronomy
nanotechnology
microelectromechanical systems
etching
wafers
waveguides
photolithography
photoresists
masks
spacing
ions