NORMAL INCIDENCE X-UV MIRRORS.

Charles M Falco, Felix E. Fernandez, P. Dhez, A. Khandar-Shahabad, L. Nevot, B. Pardo, J. Corno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

We describe the fabrication procedure as well as results of an extensive series of characterization measurements, model-fitting and synchrotron tests on Si/W multilayers designed as normal-incidence reflectors for approximately equals 200 A radiation. Characterization techniques used were low-angle diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, Read camera, transmission electron microscopy and Rutherford backscattering spectroscopy. To our knowledge, this is the first time such a comprehensive set of characterization techniques has been applied to a multilayer x-ray mirror. Reflectances for approximately equals 200 A calculated using the results from these various characterization techniques are found to agree very well with measurements obtained with synchrotron radiation.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsErnst-Eckhard Koch, Guenter Schmahl
PublisherSPIE
Pages343-352
Number of pages10
Volume733
ISBN (Print)0892527684
StatePublished - 1987

Fingerprint

incidence
mirrors
Multilayers
Diffraction
Rutherford backscattering spectroscopy
Synchrotron radiation
Synchrotrons
diffraction
reflectors
backscattering
synchrotron radiation
synchrotrons
Mirrors
Cameras
cameras
Transmission electron microscopy
reflectance
Radiation
Fabrication
X rays

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Falco, C. M., Fernandez, F. E., Dhez, P., Khandar-Shahabad, A., Nevot, L., Pardo, B., & Corno, J. (1987). NORMAL INCIDENCE X-UV MIRRORS. In E-E. Koch, & G. Schmahl (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 733, pp. 343-352). SPIE.

NORMAL INCIDENCE X-UV MIRRORS. / Falco, Charles M; Fernandez, Felix E.; Dhez, P.; Khandar-Shahabad, A.; Nevot, L.; Pardo, B.; Corno, J.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Ernst-Eckhard Koch; Guenter Schmahl. Vol. 733 SPIE, 1987. p. 343-352.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Falco, CM, Fernandez, FE, Dhez, P, Khandar-Shahabad, A, Nevot, L, Pardo, B & Corno, J 1987, NORMAL INCIDENCE X-UV MIRRORS. in E-E Koch & G Schmahl (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 733, SPIE, pp. 343-352.
Falco CM, Fernandez FE, Dhez P, Khandar-Shahabad A, Nevot L, Pardo B et al. NORMAL INCIDENCE X-UV MIRRORS. In Koch E-E, Schmahl G, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 733. SPIE. 1987. p. 343-352
Falco, Charles M ; Fernandez, Felix E. ; Dhez, P. ; Khandar-Shahabad, A. ; Nevot, L. ; Pardo, B. ; Corno, J. / NORMAL INCIDENCE X-UV MIRRORS. Proceedings of SPIE - The International Society for Optical Engineering. editor / Ernst-Eckhard Koch ; Guenter Schmahl. Vol. 733 SPIE, 1987. pp. 343-352
@inproceedings{b4a0e49f96c44e70bc9df4fc69fcc8cd,
title = "NORMAL INCIDENCE X-UV MIRRORS.",
abstract = "We describe the fabrication procedure as well as results of an extensive series of characterization measurements, model-fitting and synchrotron tests on Si/W multilayers designed as normal-incidence reflectors for approximately equals 200 A radiation. Characterization techniques used were low-angle diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, Read camera, transmission electron microscopy and Rutherford backscattering spectroscopy. To our knowledge, this is the first time such a comprehensive set of characterization techniques has been applied to a multilayer x-ray mirror. Reflectances for approximately equals 200 A calculated using the results from these various characterization techniques are found to agree very well with measurements obtained with synchrotron radiation.",
author = "Falco, {Charles M} and Fernandez, {Felix E.} and P. Dhez and A. Khandar-Shahabad and L. Nevot and B. Pardo and J. Corno",
year = "1987",
language = "English (US)",
isbn = "0892527684",
volume = "733",
pages = "343--352",
editor = "Ernst-Eckhard Koch and Guenter Schmahl",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",

}

TY - GEN

T1 - NORMAL INCIDENCE X-UV MIRRORS.

AU - Falco, Charles M

AU - Fernandez, Felix E.

AU - Dhez, P.

AU - Khandar-Shahabad, A.

AU - Nevot, L.

AU - Pardo, B.

AU - Corno, J.

PY - 1987

Y1 - 1987

N2 - We describe the fabrication procedure as well as results of an extensive series of characterization measurements, model-fitting and synchrotron tests on Si/W multilayers designed as normal-incidence reflectors for approximately equals 200 A radiation. Characterization techniques used were low-angle diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, Read camera, transmission electron microscopy and Rutherford backscattering spectroscopy. To our knowledge, this is the first time such a comprehensive set of characterization techniques has been applied to a multilayer x-ray mirror. Reflectances for approximately equals 200 A calculated using the results from these various characterization techniques are found to agree very well with measurements obtained with synchrotron radiation.

AB - We describe the fabrication procedure as well as results of an extensive series of characterization measurements, model-fitting and synchrotron tests on Si/W multilayers designed as normal-incidence reflectors for approximately equals 200 A radiation. Characterization techniques used were low-angle diffraction, Bragg-Brentano and Seemann-Bohlin diffraction, Read camera, transmission electron microscopy and Rutherford backscattering spectroscopy. To our knowledge, this is the first time such a comprehensive set of characterization techniques has been applied to a multilayer x-ray mirror. Reflectances for approximately equals 200 A calculated using the results from these various characterization techniques are found to agree very well with measurements obtained with synchrotron radiation.

UR - http://www.scopus.com/inward/record.url?scp=0023581084&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0023581084&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0892527684

VL - 733

SP - 343

EP - 352

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Koch, Ernst-Eckhard

A2 - Schmahl, Guenter

PB - SPIE

ER -