Oblique sputtering of amorphous TbFeCo thin films on glass substrates and the effect of deposition angle on perpendicular magnetic anisotropy

Yung Chieh Hsieh, Sergei Gadetsky, Takao Suzuki, Masud Mansuripur

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We measured the magnetic hysteresis loops for several obliquely deposited amorphous TbFeCo films. The experimental results snow that the direction of the average magnetic anisotropy (i.e., the easy axis of magnetization) is no longer along the surface normal. With the help of computer simulations, we have quantified the effects of oblique deposition in terms of the deviations of local anisotropy directions from the surface normal. We also found that, with the increasing of the deposition angle, the compensation point shifts toward the Fe-rich side and the films become thinner.

Original languageEnglish (US)
Pages (from-to)3555-3560
Number of pages6
JournalJournal of Applied Physics
Issue number8
Publication statusPublished - Apr 15 1997


ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Physics and Astronomy (miscellaneous)

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