On-line measurement system for monitoring ring tool misalignments

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool misalignments in the ring grinding setup for the Opticam surface generator. A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages494-503
Number of pages10
Volume3134
DOIs
StatePublished - 1997
EventOptical Manufacturing and Testing II - San Diego, CA, United States
Duration: Jul 27 1997Jul 27 1997

Other

OtherOptical Manufacturing and Testing II
CountryUnited States
CitySan Diego, CA
Period7/27/977/27/97

Fingerprint

Misalignment
Measurement System
misalignment
Monitoring
Ring
rings
Metrology
metrology
Slope
slopes
Grinding
grinding
generators
prototypes
Generator
Prototype
Experimental Results

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Xie, T., & Greivenkamp, J. E. (1997). On-line measurement system for monitoring ring tool misalignments. In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3134, pp. 494-503) https://doi.org/10.1117/12.295150

On-line measurement system for monitoring ring tool misalignments. / Xie, Tong; Greivenkamp, John E.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3134 1997. p. 494-503.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Xie, T & Greivenkamp, JE 1997, On-line measurement system for monitoring ring tool misalignments. in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3134, pp. 494-503, Optical Manufacturing and Testing II, San Diego, CA, United States, 7/27/97. https://doi.org/10.1117/12.295150
Xie T, Greivenkamp JE. On-line measurement system for monitoring ring tool misalignments. In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3134. 1997. p. 494-503 https://doi.org/10.1117/12.295150
Xie, Tong ; Greivenkamp, John E. / On-line measurement system for monitoring ring tool misalignments. Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3134 1997. pp. 494-503
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