On-line measurement system for monitoring ring tool misalignments

Research output: Contribution to journalConference article

Abstract

A new metrology technique was developed for on-line tool misalignment detection. It is an image based metrology system. It measures surface slope functions from the captured reflected image off the test surface. The measured surface slope function is then used to determine the corresponding tool misalignments in the ring grinding setup for the Opticam surface generator. A prototype detection system was built and tested on-line in the Opticam machine. The experimental results are presented in this paper.

Original languageEnglish (US)
Pages (from-to)494-503
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3134
DOIs
StatePublished - Dec 1 1997
EventOptical Manufacturing and Testing II - San Diego, CA, United States
Duration: Jul 27 1997Jul 27 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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