Optical characterization of multilayer stacks for phase-change media

Rongguang Liang, Chubing Peng, Kenichi Nagata, Kelly Daly-Flynn, Masud Mansuripur

Research output: Contribution to journalArticle

Abstract

We report results of measurements of the optical constants of the dielectric layer (ZnS-SiO2), reflecting layer (aluminum-chromium alloy), and phase-change layer (GeSbTe, AgInSbTe) used as the media of phase-change optical recording. The refractive index n and the absorption coefficient k of these materials vary to some extent with the film thickness and with the film deposition environment. We report the observed variations of optical constants among samples of differing structure and among samples fabricated in different laboratories

Original languageEnglish (US)
Pages (from-to)134-145
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4342
DOIs
StatePublished - Jan 1 2002

Keywords

  • Ellipsometry
  • Measurement of optical constants
  • Optical data storage
  • Optical recording
  • Phase-change media
  • Reflectometry
  • Thin-film characterization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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