Optical characterization of multilayer stacks for phase-change media

Rongguang Liang, Chubing Peng, Kenichi Nagata, Kelly Daly-Flynn, Masud Mansuripur

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report results of measurements of the optical constants of the dielectric layer (ZnS-SiO2), reflecting layer (aluminum-chromium alloy), and phase-change layer (GeSbTe, AgInSbTe) used as the media of phase-change optical recording. The refractive index n and the absorption coefficient k of these materials vary to some extent with the film thickness and with the film deposition environment. We report the observed variations of optical constants among samples of differing structure and among samples fabricated in different laboratories.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsT. Hurst, S. Kobayashi
Pages134-145
Number of pages12
Volume4342
DOIs
StatePublished - 2002
EventOptical Data Storage 2001 - Santa Fe,NM, United States
Duration: Apr 22 2001Apr 25 2001

Other

OtherOptical Data Storage 2001
CountryUnited States
CitySanta Fe,NM
Period4/22/014/25/01

Fingerprint

Optical constants
Multilayers
Optical recording
Chromium alloys
chromium alloys
Film thickness
Aluminum alloys
Refractive index
aluminum alloys
absorptivity
film thickness
recording
refractivity

Keywords

  • Ellipsometry
  • Measurement of optical constants
  • Optical data storage
  • Optical recording
  • Phase-change media
  • Reflectometry
  • Thin-film characterization

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Liang, R., Peng, C., Nagata, K., Daly-Flynn, K., & Mansuripur, M. (2002). Optical characterization of multilayer stacks for phase-change media. In T. Hurst, & S. Kobayashi (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4342, pp. 134-145) https://doi.org/10.1117/12.453427

Optical characterization of multilayer stacks for phase-change media. / Liang, Rongguang; Peng, Chubing; Nagata, Kenichi; Daly-Flynn, Kelly; Mansuripur, Masud.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / T. Hurst; S. Kobayashi. Vol. 4342 2002. p. 134-145.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Liang, R, Peng, C, Nagata, K, Daly-Flynn, K & Mansuripur, M 2002, Optical characterization of multilayer stacks for phase-change media. in T Hurst & S Kobayashi (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4342, pp. 134-145, Optical Data Storage 2001, Santa Fe,NM, United States, 4/22/01. https://doi.org/10.1117/12.453427
Liang R, Peng C, Nagata K, Daly-Flynn K, Mansuripur M. Optical characterization of multilayer stacks for phase-change media. In Hurst T, Kobayashi S, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4342. 2002. p. 134-145 https://doi.org/10.1117/12.453427
Liang, Rongguang ; Peng, Chubing ; Nagata, Kenichi ; Daly-Flynn, Kelly ; Mansuripur, Masud. / Optical characterization of multilayer stacks for phase-change media. Proceedings of SPIE - The International Society for Optical Engineering. editor / T. Hurst ; S. Kobayashi. Vol. 4342 2002. pp. 134-145
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