We have performed angle-dependent reflectance measurements of in situ magnetron sputtered films of B4C, C, Mo, Si, and W. The Fresnel relations were used to determine the complex index of refraction from the reflectance data in the region of approximately 35-150 eV. In the cases of Si, C, and B4C we found excellent agreement with published data. However, for Mo and W we found that the optical properties from 35 to 60 eV differed significantly from those in the literature.
|Original language||English (US)|
|Number of pages||5|
|Publication status||Published - 1998|
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics