Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials

Charles Tarrio, Richard N. Watts, Thomas B. Lucatorto, Jon M. Slaughter, Charles M. Falco

Research output: Contribution to journalArticlepeer-review

38 Scopus citations

Fingerprint Dive into the research topics of 'Optical constants of in situ-deposited films of important extreme-ultraviolet multilayer mirror materials'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy