Optical design and system characterization of an imaging microscope at 121.6 nm

Weichuan Gao, Emily Finan, Geon Hee Kim, Youngsik Kim, Thomas D. Milster

Research output: Contribution to journalArticle


We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.

Original languageEnglish (US)
Article number035101
JournalOptical Engineering
Issue number3
StatePublished - Mar 1 2018



  • Alignment
  • Midspatial frequency error
  • Phase plate
  • Schwarzschild objective
  • Vacuum ultraviolet

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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