Optical design and system characterization of an imaging microscope at 121.6 nm

Weichuan Gao, Emily Finan, Geon Hee Kim, Youngsik Kim, Thomas D. Milster

Research output: Contribution to journalArticlepeer-review

Abstract

We present the optical design and system characterization of an imaging microscope prototype at 121.6 nm. System engineering processes are demonstrated through the construction of a Schwarzschild microscope objective, including tolerance analysis, fabrication, alignment, and testing. Further improvements on the as-built system with a correction phase plate are proposed and analyzed. Finally, the microscope assembly and the imaging properties of the prototype are demonstrated.

Original languageEnglish (US)
Article number035101
JournalOptical Engineering
Volume57
Issue number3
DOIs
StatePublished - Mar 1 2018

Keywords

  • Alignment
  • Midspatial frequency error
  • Phase plate
  • Schwarzschild objective
  • Vacuum ultraviolet

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)

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