Optical design for the optimum solid immersion lens with high numerical aperture and large tolerance

Narak Choi, Seongbo Shim, Tom D. Milster, Jaisoon Kim

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

Super hemispherical solid immersion lens system becomes a matter of interest due to its high numerical aperture (NA) gain. However, because of the instability of the aplanatic condition, even small amount of alignment error can easily lower the optical performance. To overcome the instability while maintaining high NA gain, we suggest an optimum solid immersion lens (opti-SIL) system which combines the advantages of both super hemispherical SIL (hyper-SIL) and hemispherical SIL (hemi-SIL). Exemplary designs and simulation results of the tolerance analysis show that opti-SIL system has much higher tolerances to various performance-lowering factors than hyper-SIL, even with relatively small NA resignation.

Original languageEnglish (US)
Pages (from-to)3724-3728
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume46
Issue number6 B
DOIs
StatePublished - Jun 22 2007

Keywords

  • Hemi-SIL
  • Hyper-SIL
  • NA gain
  • Near field recording
  • Opti-SIL
  • Tolerance

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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