Abstract
An optical characterization of thin semiconducting multilayers in the infrared range, using a combination of m-lines and reflection spectroscopy techniques is exposed. Such a method, non-destructive, allows to determine the thickness and the refractive index of each component of a multilayer multimodal planar waveguide.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 23-26 |
| Number of pages | 4 |
| Journal | Applied Physics A Solids and Surfaces |
| Volume | 30 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 1983 |
| Externally published | Yes |
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Keywords
- 07.60
- 42.80
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Materials Science(all)
- Engineering(all)
Cite this
Optical properties determination at 10.6 μm of thin semiconducting layers. / Falco, Charles M; Botineau, J.; Azema, A.; de Micheli, M.; Ostrowsky, D. B.
In: Applied Physics A Solids and Surfaces, Vol. 30, No. 1, 01.1983, p. 23-26.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Optical properties determination at 10.6 μm of thin semiconducting layers
AU - Falco, Charles M
AU - Botineau, J.
AU - Azema, A.
AU - de Micheli, M.
AU - Ostrowsky, D. B.
PY - 1983/1
Y1 - 1983/1
N2 - An optical characterization of thin semiconducting multilayers in the infrared range, using a combination of m-lines and reflection spectroscopy techniques is exposed. Such a method, non-destructive, allows to determine the thickness and the refractive index of each component of a multilayer multimodal planar waveguide.
AB - An optical characterization of thin semiconducting multilayers in the infrared range, using a combination of m-lines and reflection spectroscopy techniques is exposed. Such a method, non-destructive, allows to determine the thickness and the refractive index of each component of a multilayer multimodal planar waveguide.
KW - 07.60
KW - 42.80
UR - http://www.scopus.com/inward/record.url?scp=0020542546&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0020542546&partnerID=8YFLogxK
U2 - 10.1007/BF00617709
DO - 10.1007/BF00617709
M3 - Article
VL - 30
SP - 23
EP - 26
JO - Applied Physics
JF - Applied Physics
SN - 0340-3793
IS - 1
ER -