Abstract
An optical characterization of thin semiconducting multilayers in the infrared range, using a combination of m-lines and reflection spectroscopy techniques is exposed. Such a method, non-destructive, allows to determine the thickness and the refractive index of each component of a multilayer multimodal planar waveguide.
Original language | English (US) |
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Pages (from-to) | 23-26 |
Number of pages | 4 |
Journal | Applied Physics A Solids and Surfaces |
Volume | 30 |
Issue number | 1 |
DOIs | |
State | Published - Jan 1 1983 |
Keywords
- 07.60
- 42.80
ASJC Scopus subject areas
- Materials Science(all)
- Engineering(all)
- Physics and Astronomy (miscellaneous)