Optical properties determination at 10.6 μm of thin semiconducting layers

Charles M Falco, J. Botineau, A. Azema, M. de Micheli, D. B. Ostrowsky

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

An optical characterization of thin semiconducting multilayers in the infrared range, using a combination of m-lines and reflection spectroscopy techniques is exposed. Such a method, non-destructive, allows to determine the thickness and the refractive index of each component of a multilayer multimodal planar waveguide.

Original languageEnglish (US)
Pages (from-to)23-26
Number of pages4
JournalApplied Physics A Solids and Surfaces
Volume30
Issue number1
DOIs
StatePublished - Jan 1983
Externally publishedYes

Fingerprint

Multilayers
Optical properties
refractivity
waveguides
optical properties
Planar waveguides
spectroscopy
Refractive index
Spectroscopy
Infrared radiation

Keywords

  • 07.60
  • 42.80

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Materials Science(all)
  • Engineering(all)

Cite this

Optical properties determination at 10.6 μm of thin semiconducting layers. / Falco, Charles M; Botineau, J.; Azema, A.; de Micheli, M.; Ostrowsky, D. B.

In: Applied Physics A Solids and Surfaces, Vol. 30, No. 1, 01.1983, p. 23-26.

Research output: Contribution to journalArticle

Falco, Charles M ; Botineau, J. ; Azema, A. ; de Micheli, M. ; Ostrowsky, D. B. / Optical properties determination at 10.6 μm of thin semiconducting layers. In: Applied Physics A Solids and Surfaces. 1983 ; Vol. 30, No. 1. pp. 23-26.
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