Optical properties determination at 10.6 μm of thin semiconducting layers

C. Falco, J. Botineau, A. Azema, M. de Micheli, D. B. Ostrowsky

Research output: Contribution to journalArticle

6 Scopus citations

Abstract

An optical characterization of thin semiconducting multilayers in the infrared range, using a combination of m-lines and reflection spectroscopy techniques is exposed. Such a method, non-destructive, allows to determine the thickness and the refractive index of each component of a multilayer multimodal planar waveguide.

Original languageEnglish (US)
Pages (from-to)23-26
Number of pages4
JournalApplied Physics A Solids and Surfaces
Volume30
Issue number1
DOIs
StatePublished - Jan 1 1983

Keywords

  • 07.60
  • 42.80

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy (miscellaneous)

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