Optical reference profilometry

Stephan R. Clark, John E Greivenkamp

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

The optical reference profilometer is a coordinate measurement machine (CMM) configuration that utilizes a special optical referencing frame to provide a stable and accurate surface measurement. This referencing frame provides several mechanical advantages that make it possible to use lower precision mechanical components while still maintaining high measurement accuracy. The optical reference profilometer also provides reduced measurement sensitivity to thermal variations of the environment. By utilizing a superinvar metering rod network, this CMM system is essentially thermally insensitive to temperature changes of the order of 1°C. This special feature makes the optical reference profilometer functional at a high measurement accuracy level in an open laboratory environment.

Original languageEnglish (US)
Pages (from-to)2845-2851
Number of pages7
JournalOptical Engineering
Volume40
Issue number12
DOIs
StatePublished - Dec 2001

Fingerprint

Profilometry
profilometers
Surface measurement
rods
configurations
Temperature

Keywords

  • Coordinate measurement machine
  • Optical surface metrology
  • Optical testing
  • Profilometry

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

Cite this

Optical reference profilometry. / Clark, Stephan R.; Greivenkamp, John E.

In: Optical Engineering, Vol. 40, No. 12, 12.2001, p. 2845-2851.

Research output: Contribution to journalArticle

Clark, Stephan R. ; Greivenkamp, John E. / Optical reference profilometry. In: Optical Engineering. 2001 ; Vol. 40, No. 12. pp. 2845-2851.
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