Optical surface measurements for very large flat mirrors

J. H. Burge, P. Su, J. Yellowhair, C. Zhao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations

Abstract

Flat mirrors as large as 4 meters in diameter can be manufactured to high accuracy, limited by the surface metrology. We present metrology systems that are specifically optimized for measuring very large flats to high accuracy. A large aperture vibration insensitive Fizeau interferometer combined with stitching software provides high resolution surface measurements. Low order shape errors can be measured using scanning slope measurements from precision inclinometers or an autocollimator with scanning pentaprism.

Original languageEnglish (US)
Title of host publicationAdvanced Optical and Mechanical Technologies in Telescopes and Instrumentation
DOIs
StatePublished - 2008
Externally publishedYes
EventAdvanced Optical and Mechanical Technologies in Telescopes and Instrumentation - Marseille, France
Duration: Jun 23 2008Jun 28 2008

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7018
ISSN (Print)0277-786X

Other

OtherAdvanced Optical and Mechanical Technologies in Telescopes and Instrumentation
Country/TerritoryFrance
CityMarseille
Period6/23/086/28/08

Keywords

  • Flat mirrors
  • Large optics
  • Optical fabrication
  • Optical testing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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