Optical testing for meter size aspheric optics

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Several meter size steep aspheric optics, with aspheric departure ranging from 100μm to 2mm, have been successfully fabricated at the College of Optical Sciences at University of Arizona. Optical metrology systems have been developed for measuring the optical surfaces efficiently and accurately. These systems include laser tracker surface profiler, swing arm optical CMM with different type of sensors, slope measurements with SCOTS, the Software Configurable Optical Test System (SCOTS) and interferometry with computer generated holograms. We summarize the test methods and provide comparison of the relative strengths and weaknesses.

Original languageEnglish (US)
Title of host publicationInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
DOIs
StatePublished - Dec 1 2012
EventInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI - San Diego, CA, United States
Duration: Aug 13 2012Aug 14 2012

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8466
ISSN (Print)0277-786X

Other

OtherInstrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI
CountryUnited States
CitySan Diego, CA
Period8/13/128/14/12

Keywords

  • Aspherics
  • Deflectometry
  • Fringe reflection
  • Interferometry
  • Optical metrology
  • Optical testing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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