Optical testing using Shack-Hartmann wavefront sensors

John E Greivenkamp, D. G. Smith, R. O. Gappinger, G. A. Williby

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Scopus citations

Abstract

The basic problem associated with aspheric testing without the use of null optics is to obtain increased measurement range while maintaining the required measurement accuracy. Typically, the introduction of a custom-designed and fabricated null corrector has allowed the problem of aspheric testing to be reduced to that of spherical testing. Shack-Hartmann wavefront sensors have been used for adaptive optics, but have seen little application in optical metrology. We will discuss the use of a Shack-Hartmann wavefront sensor as a means of directly testing wavefronts with large aspheric departures. The Shack-Hartmann sensor provides interesting tradeoffs between measurement range, accuracy and spatial resolution. We will discuss the advantages and disadvantages of the Shack-Hartmann wavefront sensor over more conventional metrology tests. The implementation of a Shack-Hartmann wavefront sensor for aspheric testing will be shown.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsK. Iwata
Pages260-263
Number of pages4
Volume4416
DOIs
Publication statusPublished - 2001
EventOptical Engineering for Sensing and Nanotechnology (ICOSN 2001) - Yokohama, Japan
Duration: Jun 6 2001Jun 8 2001

Other

OtherOptical Engineering for Sensing and Nanotechnology (ICOSN 2001)
CountryJapan
CityYokohama
Period6/6/016/8/01

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Greivenkamp, J. E., Smith, D. G., Gappinger, R. O., & Williby, G. A. (2001). Optical testing using Shack-Hartmann wavefront sensors. In K. Iwata (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4416, pp. 260-263) https://doi.org/10.1117/12.427063