Optical testing with computer generated holograms: Comprehensive error analysis

Chunyu Zhao, James H. Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Scopus citations

Abstract

Interferometry with computer generated holograms (CGHs) has become the industry standard for accurate measurements of aspheric optical surfaces. The CGH is a diffractive optical element that can be designed to create virtually any phase or amplitude distribution, and can be accurately manufactured using methods and equipment developed for integrated circuit production. Surface measurements with nanometer level precision can be performed using accurately wellcalibrated equipment. This paper provides a systematic analysis of all significant sources of error for CGH metrology, including encoding error, pattern distortion, substrate irregularity and calibration, and system alignment.

Original languageEnglish (US)
Title of host publicationOptical Manufacturing and Testing X
DOIs
StatePublished - Nov 28 2013
EventOptical Manufacturing and Testing X - San Diego, CA, United States
Duration: Aug 26 2013Aug 27 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8838
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherOptical Manufacturing and Testing X
CountryUnited States
CitySan Diego, CA
Period8/26/138/27/13

Keywords

  • Aspheric metrology
  • Computer Generated Hologram
  • Freeform aspherics
  • Optical testing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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