Optically balanced, multi-pass displacement interferometry for picometer stability testing

Jonathan D. Ellis, Justine H. Hatzigeorgopoulos, Jo W. Spronck, Robert H.Munnig Schmidt

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings of the 22nd Annual ASPE Meeting, ASPE 2007
StatePublished - Dec 1 2007
Externally publishedYes
Event22nd Annual Meeting of the American Society for Precision Engineering, ASPE 2007 - Dallas, TX, United States
Duration: Oct 14 2007Oct 19 2007

Publication series

NameProceedings of the 22nd Annual ASPE Meeting, ASPE 2007

Conference

Conference22nd Annual Meeting of the American Society for Precision Engineering, ASPE 2007
Country/TerritoryUnited States
CityDallas, TX
Period10/14/0710/19/07

ASJC Scopus subject areas

  • Mechanical Engineering

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