Optically balanced, multi-pass displacement interferometry for picometer stability testing

Jonathan D. Ellis, Justine H. Hatzigeorgopoulos, Jo W. Spronck, Robert H.Munnig Schmidt

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations
Original languageEnglish (US)
Title of host publicationProceedings of the 22nd Annual ASPE Meeting, ASPE 2007
StatePublished - Dec 1 2007
Externally publishedYes
Event22nd Annual Meeting of the American Society for Precision Engineering, ASPE 2007 - Dallas, TX, United States
Duration: Oct 14 2007Oct 19 2007

Publication series

NameProceedings of the 22nd Annual ASPE Meeting, ASPE 2007

Conference

Conference22nd Annual Meeting of the American Society for Precision Engineering, ASPE 2007
CountryUnited States
CityDallas, TX
Period10/14/0710/19/07

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Ellis, J. D., Hatzigeorgopoulos, J. H., Spronck, J. W., & Schmidt, R. H. M. (2007). Optically balanced, multi-pass displacement interferometry for picometer stability testing. In Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007 (Proceedings of the 22nd Annual ASPE Meeting, ASPE 2007).