Abstract
Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 142-149 |
| Number of pages | 8 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 13 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 1995 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Optimization of electrostatic deflectors. / Szilagyi, Miklos N; Cho, H.
In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 13, No. 1, 01.1995, p. 142-149.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Optimization of electrostatic deflectors
AU - Szilagyi, Miklos N
AU - Cho, H.
PY - 1995/1
Y1 - 1995/1
N2 - Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.
AB - Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.
UR - http://www.scopus.com/inward/record.url?scp=0029207368&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0029207368&partnerID=8YFLogxK
U2 - 10.1116/1.587972
DO - 10.1116/1.587972
M3 - Article
AN - SCOPUS:0029207368
VL - 13
SP - 142
EP - 149
JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
SN - 1071-1023
IS - 1
ER -