Optimization of electrostatic deflectors

M. Szilagyi; H. Cho

doi:10.1116/1.587972

Optimization of electrostatic deflectors

M. Szilagyi, H. Cho

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.

Original language	English (US)
Pages (from-to)	142-149
Number of pages	8
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	13
Issue number	1
DOIs	https://doi.org/10.1116/1.587972
State	Published - Jan 1 1995

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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Optimization of electrostatic deflectors

Abstract

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