Optimization of electrostatic deflectors

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Abstract

Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.

Original languageEnglish (US)
Pages (from-to)142-149
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number1
DOIs
Publication statusPublished - Jan 1995

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Optimization of electrostatic deflectors. / Szilagyi, Miklos N; Cho, H.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 13, No. 1, 01.1995, p. 142-149.

Research output: Contribution to journalArticle