Optimization of electrostatic deflectors

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.

Original languageEnglish (US)
Pages (from-to)142-149
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number1
DOIs
StatePublished - Jan 1995

Fingerprint

Splines
Electrostatics
Electrostatic lenses
Aberrations
Distribution functions
Electrodes

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Optimization of electrostatic deflectors. / Szilagyi, Miklos N; Cho, H.

In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 13, No. 1, 01.1995, p. 142-149.

Research output: Contribution to journalArticle

@article{1ffcd552ef2343bdbab4adba4739b1b4,
title = "Optimization of electrostatic deflectors",
abstract = "Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.",
author = "Szilagyi, {Miklos N} and H. Cho",
year = "1995",
month = "1",
doi = "10.1116/1.587972",
language = "English (US)",
volume = "13",
pages = "142--149",
journal = "Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "1",

}

TY - JOUR

T1 - Optimization of electrostatic deflectors

AU - Szilagyi, Miklos N

AU - Cho, H.

PY - 1995/1

Y1 - 1995/1

N2 - Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.

AB - Optimization of electrostatic lenses was successfully achieved by using the cubic spline method or the a priori given multielectrode approach. In this article we propose optimization of electrostatic deflectors by using the cubic spline method for the purpose of attaining the minimum beam spot size. We propose the reconstruction of the electrodes of electrostatic spline deflectors in terms of the optimized first harmonic field distribution functions. Our calculations show that geometrical deflection aberrations can be reduced by 2-3 orders of magnitude.

UR - http://www.scopus.com/inward/record.url?scp=0029207368&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029207368&partnerID=8YFLogxK

U2 - 10.1116/1.587972

DO - 10.1116/1.587972

M3 - Article

AN - SCOPUS:0029207368

VL - 13

SP - 142

EP - 149

JO - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

JF - Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

SN - 1071-1023

IS - 1

ER -