Patterning of sub-50 nm perpendicular CoFeB/MgO-based magnetic tunnel junctions

Larysa Tryputen, Kun Hua Tu, Stephan K. Piotrowski, Mukund Bapna, Sara A. Majetich, Congli Sun, Paul M. Voyles, Hamid Almasi, Weigang Wang, Patricio Vargas, Jason S. Tresback, Caroline A. Ross

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