PCB-integrated metallic thermal micro-actuators

Eniko T Enikov, Kalin Lazarov

Research output: Contribution to journalArticle

45 Citations (Scopus)

Abstract

The development of thermal micro-actuators on printed circuit boards is described. The fabricated metal actuators are shown to have similar displacement characteristics when compared with silicon-based devices described in the literature. The actuators are benchmarked with respect to power consumption, stroke, and response time. It is further demonstrated that simple analytical estimates for the response time are in good agreement with the experimental measurements and finite element analysis. The thermal cooling transient times are captured using a two-step constant-current excitation method. The fabrication process and potential application areas of the developed device are also provided.

Original languageEnglish (US)
Pages (from-to)76-82
Number of pages7
JournalSensors and Actuators, A: Physical
Volume105
Issue number1
DOIs
StatePublished - Jun 15 2003

Fingerprint

polychlorinated biphenyls
Polychlorinated Biphenyls
Polychlorinated biphenyls
Actuators
actuators
printed circuits
circuit boards
Silicon
strokes
Printed circuit boards
Electric power utilization
Metals
Cooling
cooling
Finite element method
Fabrication
fabrication
silicon
estimates
metals

Keywords

  • MEMS
  • Micro-relay
  • Thermal micro-actuator
  • Thermal response time

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

PCB-integrated metallic thermal micro-actuators. / Enikov, Eniko T; Lazarov, Kalin.

In: Sensors and Actuators, A: Physical, Vol. 105, No. 1, 15.06.2003, p. 76-82.

Research output: Contribution to journalArticle

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