Performing mean residence time analysis of CMP processes

Ara Philipossian, Erin Mitchell

Research output: Contribution to journalArticle

31 Scopus citations

Abstract

There is no abstract available for the item entitled Performing mean residence time analysis of CMP processes.

Original languageEnglish (US)
Pages (from-to)85-95
Number of pages11
JournalMICRO
Volume20
Issue number7
StatePublished - Dec 1 2002

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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