Performing mean residence time analysis of CMP processes

Ara Philipossian, Erin Mitchell

Research output: Contribution to journalArticle

31 Scopus citations

Abstract

There is no abstract available for the item entitled Performing mean residence time analysis of CMP processes.

Original languageEnglish (US)
Pages (from-to)85-95
Number of pages11
JournalMICRO
Volume20
Issue number7
Publication statusPublished - 2002

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ASJC Scopus subject areas

  • Computer Science(all)
  • Electrical and Electronic Engineering
  • Aerospace Engineering
  • Electronic, Optical and Magnetic Materials

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