Periodic Error Compensation in Fiber-coupled Heterodyne Interferometry

Chao Lu; Ethan D. Burnham-Fay; Jonathan D. Ellis; Tony L. Schmitz; Joshua A. Tarbutton

doi:10.1016/j.promfg.2017.07.015

Periodic Error Compensation in Fiber-coupled Heterodyne Interferometry

Chao Lu, Ethan D. Burnham-Fay, Jonathan D. Ellis, Tony L. Schmitz, Joshua A. Tarbutton

Research output: Contribution to journal › Article

Abstract

This paper extends the application of a novel wavelet-based periodic error compensation algorithm in fiber-coupled heterodyne interferometry. In this case, the amplitudes of periodic error may be fluctuating and traditional digital algorithms are not well-suited. The wavelet-based method, however, has the ability to compensate non-stationary periodic error. In this work, the algorithm is used to compensate periodic error in simulated and experimental constant and experimental non-constant velocity motions and to reduce the error by approximately 80.1%, 81.2% and 68.3%.

Original language	English (US)
Pages (from-to)	674-682
Number of pages	9
Journal	Procedia Manufacturing
Volume	10
DOIs	https://doi.org/10.1016/j.promfg.2017.07.015
Publication status	Published - Jan 1 2017
Externally published	Yes

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Keywords

Heterodyne
Interferometry
Periodic Error
Signal Processing
Wavelet Transform

ASJC Scopus subject areas

Artificial Intelligence
Industrial and Manufacturing Engineering

Cite this

Lu, C., Burnham-Fay, E. D., Ellis, J. D., Schmitz, T. L., & Tarbutton, J. A. (2017). Periodic Error Compensation in Fiber-coupled Heterodyne Interferometry. Procedia Manufacturing, 10, 674-682. https://doi.org/10.1016/j.promfg.2017.07.015

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10.1016/j.promfg.2017.07.015