Phase change in microchannel heat sink under forced convection boiling

Linan Jiang, Man Wong, Yitshak Zohar

Research output: Chapter in Book/Report/Conference proceedingChapter

26 Citations (Scopus)

Abstract

A microchannel heat sink system, consisting of parallel microchannels, distributed temperature micro-sensors and a local heater, has been fabricated and characterized. V-grooves with hydraulic diameter of either 40 μm or 80 μm were formed by bulk silicon etching. The heater and temperature microsensor array were fabricated using surface micromachining. Microchannels were realized by bonding a glass wafer to the silicon substrate, resulting in a transparent cover for flow visualization. Phase change during the boiling process was studied under forced convection conditions, where DI water was used as the working fluid. No boiling plateau, associated with latent heat, has been observed in the boiling curves of microchannel heat sinks. Flow visualization was carried out to understand the boiling mechanism in such a system. Three phase-change modes were observed depending on the input power level. Local nucleation boiling within the microchannels occurred at low power level. At moderate levels, large bubbles developed at the inlet/outlet regions, and the upstream bubbles were forced through the channels and out of the system. At higher input power levels, a stable annular flow mode was observed, where a thin liquid film coated each channel wall until critical heat flux conditions developed with a dryout of the system.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
PublisherIEEE
Pages397-402
Number of pages6
StatePublished - 2000
Externally publishedYes
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: Jan 23 2000Jan 27 2000

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period1/23/001/27/00

Fingerprint

Forced convection
Heat sinks
Microchannels
Boiling liquids
Flow visualization
Surface micromachining
Silicon
Microsensors
Latent heat
Liquid films
Heat flux
Etching
Nucleation
Hydraulics
Glass
Thin films
Temperature
Fluids
Sensors
Substrates

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Jiang, L., Wong, M., & Zohar, Y. (2000). Phase change in microchannel heat sink under forced convection boiling. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 397-402). IEEE.

Phase change in microchannel heat sink under forced convection boiling. / Jiang, Linan; Wong, Man; Zohar, Yitshak.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2000. p. 397-402.

Research output: Chapter in Book/Report/Conference proceedingChapter

Jiang, L, Wong, M & Zohar, Y 2000, Phase change in microchannel heat sink under forced convection boiling. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, pp. 397-402, 13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, Jpn, 1/23/00.
Jiang L, Wong M, Zohar Y. Phase change in microchannel heat sink under forced convection boiling. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE. 2000. p. 397-402
Jiang, Linan ; Wong, Man ; Zohar, Yitshak. / Phase change in microchannel heat sink under forced convection boiling. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, 2000. pp. 397-402
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