Phase-shifting interferometry and maximum-likelihood estimation theory. II. A generalized solution

Eric W. Rogala, Harrison H. Barrett

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

A novel means of quantitatively assessing the performance of a phase-shifting interferometer is further investigated. We show how maximum-likelihood estimation theory can be used to estimate the surface profile from the general case of M noisy, phase-shifted measurements. Monte Carlo experiments show that the maximum-likelihood estimator is unbiased and efficient, achieving the theoretical Cramér-Rao lower bound on the variance of the error. We then use Monte Carlo experiments to compare the performance of the maximum-likelihood estimator with that of two conventional algorithms.

Original languageEnglish (US)
Pages (from-to)7253-7258
Number of pages6
JournalApplied optics
Volume37
Issue number31
DOIs
StatePublished - Nov 1 1998

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

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