Photopatternable sol-gel for compound semiconductor processing

Mahmoud Fallahi, Robert Bedford, Dong Lu

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

An overview is given of several features of hybrid inorganic-organic sol-gel for compound semiconductor processing. Hybrid sol-gel films, with dual organic-inorganic properties, can be easily spin-coated and photopatterned on semiconductor substrates and used as the dielectric masking layer for dry etching of semiconductor compounds such as GaAs and InP. Planarization capabilities of the hybrid sol-gels on deep mesas are also demonstrated.

Original languageEnglish (US)
Pages (from-to)2942-2945
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number6
DOIs
StatePublished - Nov 1 2002

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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