Physical and chemical characterization of laser-recorded phase-change marks on amorphous ge2sb2te5 thin films

Chia Min Chang, Ming Lun Tseng, Cheng Hung Chu, Masud Mansuripur, Din Ping Tsai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As-deposited thin films of Ge2Sb2Te5 are investigated for the purpose of understanding the local electrical conductivity and structural phase-transitions of recorded marks under the influence of focused laser beam. We have written on these films micron-sized crystalline marks, ablated holes surrounded by crystalline rings, and other multi-ring structures containing both amorphous and crystalline zones with the aid of a focused laser beam. The high-contrast conductivity of GST recorded marks under various illumination conditions were investigated using Conductive-Atomic Force Microscopy (C-AFM). Also, selective chemical etching of recorded marks in conjunction with optical, atomic force, and electron microscopy as well as local electron diffraction analysis are used to discern the complex structural features created under a broad range of laser powers and pulse durations. Clarifying the nature of physical and chemical characterization associated with laser-recorded marks in chalcogenide Ge2Sb2Te5 thin films provides useful information for reversible optical and electronic data storage, as well as for phase-change (thermal) lithography.

Original languageEnglish (US)
Title of host publicationJoint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011
PublisherOptical Society of America (OSA)
ISBN (Print)9781557529152
DOIs
StatePublished - 2011
EventJoint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011 - Kauai, HI, United States
Duration: Jul 17 2011Jul 20 2011

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherJoint International Symposium on Optical Memory and Optical Data Storage, ISOM_ODS 2011
Country/TerritoryUnited States
CityKauai, HI
Period7/17/117/20/11

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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