Piezodriven scanner for cryogenic applications

Lloyd J. La Comb, C. F. Quate

Research output: Contribution to journalArticle

3 Scopus citations

Abstract

A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.

Original languageEnglish (US)
Pages (from-to)1906-1910
Number of pages5
JournalReview of Scientific Instruments
Volume59
Issue number9
DOIs
StatePublished - Dec 1 1988
Externally publishedYes

ASJC Scopus subject areas

  • Instrumentation

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