Piezodriven scanner for cryogenic applications

Lloyd J LaComb, C. F. Quate

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.

Original languageEnglish (US)
Pages (from-to)1906-1910
Number of pages5
JournalReview of Scientific Instruments
Volume59
Issue number9
DOIs
StatePublished - 1988
Externally publishedYes

Fingerprint

Refrigerators
Hinges
Cryogenics
travel
scanners
Dilution
cryogenics
Helium
Microscopes
Scanning
hinges
flexing
refrigerators
Liquids
cryogenic temperature
liquid helium
dilution
microscopes
heat
Temperature

ASJC Scopus subject areas

  • Instrumentation
  • Physics and Astronomy (miscellaneous)

Cite this

Piezodriven scanner for cryogenic applications. / LaComb, Lloyd J; Quate, C. F.

In: Review of Scientific Instruments, Vol. 59, No. 9, 1988, p. 1906-1910.

Research output: Contribution to journalArticle

LaComb, Lloyd J ; Quate, C. F. / Piezodriven scanner for cryogenic applications. In: Review of Scientific Instruments. 1988 ; Vol. 59, No. 9. pp. 1906-1910.
@article{1e3c655863f24ba8a8eb1f25ac3681d0,
title = "Piezodriven scanner for cryogenic applications",
abstract = "A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.",
author = "LaComb, {Lloyd J} and Quate, {C. F.}",
year = "1988",
doi = "10.1063/1.1140049",
language = "English (US)",
volume = "59",
pages = "1906--1910",
journal = "Review of Scientific Instruments",
issn = "0034-6748",
publisher = "American Institute of Physics Publising LLC",
number = "9",

}

TY - JOUR

T1 - Piezodriven scanner for cryogenic applications

AU - LaComb, Lloyd J

AU - Quate, C. F.

PY - 1988

Y1 - 1988

N2 - A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.

AB - A scanning microscope stage has been developed for use at cryogenic temperatures. The stage uses a piezoelectric driving element and circular flexure hinges to achieve a slow scan travel of greater than 10 μm and a near-resonance travel of 100 μm while immersed in liquid helium at 4.2 K. The scanner has been operated inside a pressure cell in a dilution refrigerator, where it dissipates less than 150 μW of heat at 100 mK.

UR - http://www.scopus.com/inward/record.url?scp=11744360944&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=11744360944&partnerID=8YFLogxK

U2 - 10.1063/1.1140049

DO - 10.1063/1.1140049

M3 - Article

VL - 59

SP - 1906

EP - 1910

JO - Review of Scientific Instruments

JF - Review of Scientific Instruments

SN - 0034-6748

IS - 9

ER -