Piezoelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios

G. Teowee, K. C. McCarthy, F. S. McCarthy, D. G. Davis, J. T. Dawley, B. J J Zelinski, Donald R Uhlmann

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Piezoelectric thin films are useful for application in microelectromechanical devices. A series of sol-gel derived PZT (lead zirconate titanate) thin films with various Zr/Ti ratios were prepared on platinized substrates. These films were fired to 650C - 700C to crystallize them into single-phase perovskite films, and their piezoelectric properties were measured using optical lever-based instrumentation. Large d33 piezoelectric coefficients up to 400 pm/V were obtained at the morphotropic phase boundary (PZT 53/47), making such films attractive in applications such as thin film transducers, microcantilevers and surface acoustic wave devices.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMRS
Pages439-444
Number of pages6
Volume493
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1997 MRS Fall Symposium - Boston, MA, USA
Duration: Nov 30 1997Dec 4 1997

Other

OtherProceedings of the 1997 MRS Fall Symposium
CityBoston, MA, USA
Period11/30/9712/4/97

Fingerprint

Sol-gels
Thin films
Microelectromechanical devices
Acoustic surface wave devices
Phase boundaries
Perovskite
Transducers
Substrates
perovskite
lead titanate zirconate

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Teowee, G., McCarthy, K. C., McCarthy, F. S., Davis, D. G., Dawley, J. T., Zelinski, B. J. J., & Uhlmann, D. R. (1998). Piezoelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. In Materials Research Society Symposium - Proceedings (Vol. 493, pp. 439-444). MRS.

Piezoelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. / Teowee, G.; McCarthy, K. C.; McCarthy, F. S.; Davis, D. G.; Dawley, J. T.; Zelinski, B. J J; Uhlmann, Donald R.

Materials Research Society Symposium - Proceedings. Vol. 493 MRS, 1998. p. 439-444.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Teowee, G, McCarthy, KC, McCarthy, FS, Davis, DG, Dawley, JT, Zelinski, BJJ & Uhlmann, DR 1998, Piezoelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. in Materials Research Society Symposium - Proceedings. vol. 493, MRS, pp. 439-444, Proceedings of the 1997 MRS Fall Symposium, Boston, MA, USA, 11/30/97.
Teowee G, McCarthy KC, McCarthy FS, Davis DG, Dawley JT, Zelinski BJJ et al. Piezoelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. In Materials Research Society Symposium - Proceedings. Vol. 493. MRS. 1998. p. 439-444
Teowee, G. ; McCarthy, K. C. ; McCarthy, F. S. ; Davis, D. G. ; Dawley, J. T. ; Zelinski, B. J J ; Uhlmann, Donald R. / Piezoelectric properties of sol-gel derived PZT thin films with various Zr/Ti ratios. Materials Research Society Symposium - Proceedings. Vol. 493 MRS, 1998. pp. 439-444
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