Piezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon

Gang Li, Yitshak Zohar, Man Wong

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Compared to conventional polycrystalline silicon (poly-Si), high-temperature re-crystallized (RC) metal-induced laterally crystallized (MILC) poly-Si has significantly improved material, mechanical and electrical properties, thus potentially allowing sensor and electronic integration on non-silicon-based substrates. In this paper, a RC-MILC poly-Si piezoresistive microphone with integrated amplifier has been designed, fabricated and tested. Measured results indicate an airborne sound sensitivity of 50 μV Pa -1 and a flat frequency response within ±3 dB between 100 Hz and 8 kHz. Using RC-MILC poly-Si, piezoresistors with gauge factor improved about 25%, noise level reduced about 50% and transistors with performance approaching that of single-crystal silicon devices have been realized.

Original languageEnglish (US)
Pages (from-to)1352-1358
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume14
Issue number10
DOIs
StatePublished - Oct 2004
Externally publishedYes

Fingerprint

Microphones
microphones
Polysilicon
amplifiers
Metals
silicon
metals
Silicon
Gages
Frequency response
Materials properties
Transistors
Electric properties
frequency response
Acoustic waves
Single crystals
transistors
Mechanical properties
electrical properties
mechanical properties

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

Cite this

@article{a9c23e6b455d4a0cbe2ebb0996c7ef14,
title = "Piezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon",
abstract = "Compared to conventional polycrystalline silicon (poly-Si), high-temperature re-crystallized (RC) metal-induced laterally crystallized (MILC) poly-Si has significantly improved material, mechanical and electrical properties, thus potentially allowing sensor and electronic integration on non-silicon-based substrates. In this paper, a RC-MILC poly-Si piezoresistive microphone with integrated amplifier has been designed, fabricated and tested. Measured results indicate an airborne sound sensitivity of 50 μV Pa -1 and a flat frequency response within ±3 dB between 100 Hz and 8 kHz. Using RC-MILC poly-Si, piezoresistors with gauge factor improved about 25{\%}, noise level reduced about 50{\%} and transistors with performance approaching that of single-crystal silicon devices have been realized.",
author = "Gang Li and Yitshak Zohar and Man Wong",
year = "2004",
month = "10",
doi = "10.1088/0960-1317/14/10/009",
language = "English (US)",
volume = "14",
pages = "1352--1358",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "10",

}

TY - JOUR

T1 - Piezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon

AU - Li, Gang

AU - Zohar, Yitshak

AU - Wong, Man

PY - 2004/10

Y1 - 2004/10

N2 - Compared to conventional polycrystalline silicon (poly-Si), high-temperature re-crystallized (RC) metal-induced laterally crystallized (MILC) poly-Si has significantly improved material, mechanical and electrical properties, thus potentially allowing sensor and electronic integration on non-silicon-based substrates. In this paper, a RC-MILC poly-Si piezoresistive microphone with integrated amplifier has been designed, fabricated and tested. Measured results indicate an airborne sound sensitivity of 50 μV Pa -1 and a flat frequency response within ±3 dB between 100 Hz and 8 kHz. Using RC-MILC poly-Si, piezoresistors with gauge factor improved about 25%, noise level reduced about 50% and transistors with performance approaching that of single-crystal silicon devices have been realized.

AB - Compared to conventional polycrystalline silicon (poly-Si), high-temperature re-crystallized (RC) metal-induced laterally crystallized (MILC) poly-Si has significantly improved material, mechanical and electrical properties, thus potentially allowing sensor and electronic integration on non-silicon-based substrates. In this paper, a RC-MILC poly-Si piezoresistive microphone with integrated amplifier has been designed, fabricated and tested. Measured results indicate an airborne sound sensitivity of 50 μV Pa -1 and a flat frequency response within ±3 dB between 100 Hz and 8 kHz. Using RC-MILC poly-Si, piezoresistors with gauge factor improved about 25%, noise level reduced about 50% and transistors with performance approaching that of single-crystal silicon devices have been realized.

UR - http://www.scopus.com/inward/record.url?scp=7044231321&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=7044231321&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/14/10/009

DO - 10.1088/0960-1317/14/10/009

M3 - Article

VL - 14

SP - 1352

EP - 1358

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 10

ER -