Plezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon

Gang Li, Yitshak Zohar, Man Wong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

Compared to conventional polycrystalline silicon (poly-Si), re-crystallized (RC) metal-induced laterally crystallized (MILC) poly-Si possesses improved mechanical and electrical properties. RC-MILC poly-Si piezoresistors exhibit ∼25% increase in gauge factor and ∼50% reduction in noise level compared to conventional poly-Si piezoresistors. RC-MILC poly-Si transistors exhibit performance approaching those built on single-crystal silicon. As a demonstration of the feasibility of using the RC-MILC poly-Si technology to realize non-trivial micro-systems, microphone integrating piezoresistive strain sensors and amplifiers has been designed, fabricated and characterized.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages548-551
Number of pages4
Publication statusPublished - 2004
Externally publishedYes
Event17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands
Duration: Jan 25 2004Jan 29 2004

Other

Other17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS): Maastricht MEMS 2004 Technical Digest
CountryNetherlands
CityMaastricht
Period1/25/041/29/04

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ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

Cite this

Li, G., Zohar, Y., & Wong, M. (2004). Plezoresistive microphone with integrated amplifier realized using metal-induced laterally crystallized polycrystalline silicon. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 548-551)