Polar coordinate laser writing systems

Error analysis of fabricated DOEs

Alexander Poleshchuk, Victor Korolkov, Vadim Cherkashin, Stephan Reichelt, James H Burge

Research output: Chapter in Book/Report/Conference proceedingConference contribution

24 Citations (Scopus)

Abstract

Diffractive optics is a field where the progress is defined by fabrication technology. Diffractive optical elements (DOEs) are generally planar structures, typically fabricated using X-Y image generators designed for semiconductor industry. However there are some kinds of DOEs for which the polar scanning geometry, where the optic rotates under a writing beam, is more preferable. In some cases polar coordinate machines provide the only practical method of fabricating DOEs with the required accuracy. It is necessary to take into account the DOE specification when choosing the fabrication method. The present paper considers peculiarities of polar coordinate laser systems for large size and high precision DOEs fabrication. The specific error sources for these systems are described and compared with those of X-Y systems. An optimal writing strategy is discussed. The wavefront aberrations of rotationally symmetric DOEs caused by fabrication errors were measured interferometrically. Different types of aberrations were identified and can be referred to certain writing errors. Interferometric measurements of the wavefront errors for binary zone plates with a 64 mm diameter and 0.45 numerical aperture have shown that the wavefront root-mean-square error does not exceed 0.009λ.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsE.B. Kley, H.P. Herzig
Pages161-172
Number of pages12
Volume4440
DOIs
StatePublished - 2001
EventLithographic and Micromachining Techniques for Optical Component Fabrication - San Diego, CA, United States
Duration: Jul 29 2001Jul 30 2001

Other

OtherLithographic and Micromachining Techniques for Optical Component Fabrication
CountryUnited States
CitySan Diego, CA
Period7/29/017/30/01

Fingerprint

Diffractive optical elements
polar coordinates
error analysis
Error analysis
fabrication
Lasers
Wavefronts
lasers
aberration
Fabrication
Aberrations
diffractive optics
root-mean-square errors
planar structures
numerical aperture
Diffractive optics
specifications
generators
industries
optics

Keywords

  • CGH
  • Computer generated holograms
  • Diffractive optical elements
  • DOE
  • Fabrication errors
  • Fabrication tolerances
  • Polar coordinate writer

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Poleshchuk, A., Korolkov, V., Cherkashin, V., Reichelt, S., & Burge, J. H. (2001). Polar coordinate laser writing systems: Error analysis of fabricated DOEs. In E. B. Kley, & H. P. Herzig (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 4440, pp. 161-172) https://doi.org/10.1117/12.448037

Polar coordinate laser writing systems : Error analysis of fabricated DOEs. / Poleshchuk, Alexander; Korolkov, Victor; Cherkashin, Vadim; Reichelt, Stephan; Burge, James H.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / E.B. Kley; H.P. Herzig. Vol. 4440 2001. p. 161-172.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Poleshchuk, A, Korolkov, V, Cherkashin, V, Reichelt, S & Burge, JH 2001, Polar coordinate laser writing systems: Error analysis of fabricated DOEs. in EB Kley & HP Herzig (eds), Proceedings of SPIE - The International Society for Optical Engineering. vol. 4440, pp. 161-172, Lithographic and Micromachining Techniques for Optical Component Fabrication, San Diego, CA, United States, 7/29/01. https://doi.org/10.1117/12.448037
Poleshchuk A, Korolkov V, Cherkashin V, Reichelt S, Burge JH. Polar coordinate laser writing systems: Error analysis of fabricated DOEs. In Kley EB, Herzig HP, editors, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 4440. 2001. p. 161-172 https://doi.org/10.1117/12.448037
Poleshchuk, Alexander ; Korolkov, Victor ; Cherkashin, Vadim ; Reichelt, Stephan ; Burge, James H. / Polar coordinate laser writing systems : Error analysis of fabricated DOEs. Proceedings of SPIE - The International Society for Optical Engineering. editor / E.B. Kley ; H.P. Herzig. Vol. 4440 2001. pp. 161-172
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