Polarization aberrations induced by graded multilayer coatings in EUV lithography

Thiago S. Jota, Russell A Chipman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Polarization aberrations in EUVL systems are evaluated via polarization ray tracing of an example system. Coating optimization and coating-induced polarization aberrations, diattenuation, and retardance on image quality are investigated.

Original languageEnglish (US)
Title of host publicationOptical Interference Coatings, OIC 2016
PublisherOSA - The Optical Society
ISBN (Print)9781943580132
StatePublished - Jul 21 2014
EventOptical Interference Coatings, OIC 2016 - Tucson, United States
Duration: Jun 19 2016Jun 24 2016

Other

OtherOptical Interference Coatings, OIC 2016
CountryUnited States
CityTucson
Period6/19/166/24/16

Fingerprint

Extreme ultraviolet lithography
Aberrations
Multilayers
Polarization
Coatings
Ray tracing
Image quality

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Jota, T. S., & Chipman, R. A. (2014). Polarization aberrations induced by graded multilayer coatings in EUV lithography. In Optical Interference Coatings, OIC 2016 OSA - The Optical Society.

Polarization aberrations induced by graded multilayer coatings in EUV lithography. / Jota, Thiago S.; Chipman, Russell A.

Optical Interference Coatings, OIC 2016. OSA - The Optical Society, 2014.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Jota, TS & Chipman, RA 2014, Polarization aberrations induced by graded multilayer coatings in EUV lithography. in Optical Interference Coatings, OIC 2016. OSA - The Optical Society, Optical Interference Coatings, OIC 2016, Tucson, United States, 6/19/16.
Jota TS, Chipman RA. Polarization aberrations induced by graded multilayer coatings in EUV lithography. In Optical Interference Coatings, OIC 2016. OSA - The Optical Society. 2014
Jota, Thiago S. ; Chipman, Russell A. / Polarization aberrations induced by graded multilayer coatings in EUV lithography. Optical Interference Coatings, OIC 2016. OSA - The Optical Society, 2014.
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